Modeling and Control of Hysteresis Characteristics of Piezoelectric Micro-Positioning Platform Based on Duhem Model

The hysteresis characteristic of piezoelectric micro-positioning platforms seriously affects its positioning accuracy in precision positioning. It is important to design an effective model and control scheme. Based on the analysis Duhem model, this paper proposes divide curve into two parts, step-up section step-down section, identify parameters, respectively, a hybrid intelligent optimization algorithm based artificial fish swarm bat proposed. simulation experiment verified that error improved was reduced by 48.97%, which greatly identification model. Finally, inverse for segmental established, composite controller integrating feedforward, feedback decoupling designed basis experimental verification carried out. results show displacement errors under different voltage signals are all within 0.25%. Therefore, established can accurately express characteristics platform, use effectively reduce caused characteristics.